Ion Energy Spectrometer IES-200

  • IES 200 Ion Spectrometer

  • Ion Energy Spectrometer IES-200 Setup on Pioneer 180 System

  • Diagram of experimental setup for IES-200

  • Energy Spectra found in IES-200 software

Diagram of experimental setup for IES-200Energy Spectra found in IES-200 software
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Special Features

  • Stand-alone, computer-controlled pulsed laser-generated ion energy measurement system.
  • Integrated universal synchronization unit: Compatible with any type of PLD laser.
  • Pulsed ion flux detection: Digitizes waveforms of both pulses, incoming and energy-discriminated.
  • Rapid analysis of kinetic energy: In a single laser pulse, determines Emax for element defined by the user.
  • Deposition flux stability analysis: Displays real-time statistical variation of arriving ion pulses.
  • Sweep mode: Allows user control over range and step size of collector bias sweeping.
  • Proprietary data processing algorithm: Allows user control over ion energy distribution N(E) and F(E).
  • 3D representation of ion pulse sweep waveforms.
  • Extensive data file library: Facilitates saving any pulse waveform and energy distribution for future analysis and presentation.
  • Time-of-flight mode: Delivers fast turn-around spectrum in TOF approximation, from a single laser pulse, in real-time.
  • Thermal ion evaluation/analysis: Estimates concentration of low-energy ions relative to energetic ions.
  • Laser pulse detection and stability analysis: Displays real-time pulse-to-pulse variations.

Overview

Neocera Ion Energy Spectrometer (IES-200) is an Electrostatic Retarding Fieldtype Spectrometer. Ions of different kinetic energy, arriving at the IES sensor are separated from electrons, discriminated by their energy, and collected by the Spectrometer. The spectrum displayed will provide information on the most important ‘figure-of-merit’ of the PLD deposition process (ie kinetic energy distribution of the ions arriving at the growth substrate).

The spectral distribution function F(E) ≡ dN(E)/dE is the derivative of the measured N(E) where N(E) is the number of ions with energy greater than E. F(E) provides the PLD user quantitative information about the PLD process.

Feature
Details
Ion Energy Range
0 - 200 eV
Energy Resolution
1 eV
Sweep Step Size
0.2 -10 V
Ion Current Amplitude Range
10-3 - 101 A
Digitizer Bandwidth
50 MHz
Time Resolution
20 ns
Synchronization Accuracy with Laser
30 ns
Pulse Repetition Rate, Max
5 Hz
Gas Pressure Range
0 - 0.200 Torr
Plasma Concentration, Max
~1013 cm -3
TOF Energy Range
10 - 1500 eV